電子放出素子、電子源、及び画像形成装置

Electron emission element, electron source, and image forming device

Abstract

PROBLEM TO BE SOLVED: To enhance electron emission characteristics and lengthen the life by forming a region covered with metal and a region covered with a metal oxide on a conductive film. SOLUTION: A metal film 6 and a metal oxide film 7 are formed on a conductive film 4 on both sides of an electron emission part 5 formed on the conductive film 4, an element electrode 3 connecting to the film 4 on the metal film 6 side is made in high potential and an element electrode 2 connecting to the film 4 on the metal oxide film 7 side is made in low potential for driving. Since the film 4 on the high potential side of the electron emission part 5 is covered with the metal film 6 having high melting point and low vapor pressure, melting and aggregation caused by temperature rising during driving are hardly produced. By forming the film 7 containing an element of an alkali earth metal. a rear earth metal, titanium, zirconium, hafnium, or the like on the low potential side of an electron emission element, electron emission current is increased and stabilized. The electron emission element on which the metal film 6 and the metal oxide film 7 are formed can keep stable electron emission characteristics for a long time.
(57)【要約】 【課題】 高品位画像形成装置を実現し得る電子ビーム 源としての電子放出素子を提供する。 【解決手段】 素子電極2,3間に、電子放出部5を有 する導電性膜4を備える電子放出素子において、電子放 出部5を境にした一方の導電性膜4上に金属被膜6が形 成され、他方の導電性膜4上に金属酸化物被膜7が形成 されていることを特徴とする。 【効果】 良好な電子放出特性と長寿命化を同時に実現 することができる。

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    US-7572164-B2August 11, 2009Canon Kabushiki KaishaMethod for manufacturing electron-emitting device, methods for manufacturing electron source and image display device using the electron-emitting device